Comparative study of textured and epitaxial ZnO films

被引：50

作者：

Ryu, YR ^{[1
]}

Zhu, S ^{[1
]}

Wrobel, JM ^{[1
]}

Jeong, HM ^{[1
]}

Miceli, PF ^{[1
]}

White, HW ^{[1
]}

机构：

[1] Univ Missouri, Dept Phys & Astron, Columbia, MO 65211 USA

来源：

JOURNAL OF CRYSTAL GROWTH | 2000年 / 216卷 / 1-4期

关键词：

epitaxial ZnO; textured ZnO; structural quality; optical quality;

D O I：

10.1016/S0022-0248(00)00434-6

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

ZnO films were synthesized by pulsed laser deposition (PLD) on GaAs and alpha-Al2O3 substrates. The properties of ZnO films on GaAs and alpha-Al2O3 have been investigated to determine the differences between epitaxial and textured ZnO films. ZnO films on GaAs show very strong emission features associated with exciton transitions as do ZnO films on alpha-Al2O3, while the crystalline structural qualities for ZnO films on alpha-Al2O3 are much better than those for ZnO films on GaAs. The properties of ZnO films are studied by comparing highly oriented, textured ZnO films on GaAs with epitaxial ZnO films on alpha-Al2O3 synthesized along the c-axis. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：326 / 329

页数：4

共 6 条

[1]

[Anonymous], 1992, DATA SCI TECHNOLOGY

[2] Transparent conducting ZnO thin films prepared by XeCl excimer laser ablation [J].

Hiramatsu, M ;

Imaeda, K ;

Horio, N ;

Nawata, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02) :669-673

[3] HIGHLY CONDUCTIVE AND TRANSPARENT SILICON DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

MINAMI, T ;

SATO, H ;

NANTO, H ;

TAKATA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (09) :L776-L779

[4] Application of pulsed-laser deposition technique for cleaning a GaAs surface and for epitaxial ZnSe film growth [J].

Ryu, YR ;

Zhu, S ;

Han, SW ;

White, HW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (05) :3058-3063

[5] Synthesis of p-type ZnO films [J].

Ryu, YR ;

Zhu, S ;

Look, DC ;

Wrobel, JM ;

Jeong, HM ;

White, HW .

JOURNAL OF CRYSTAL GROWTH, 2000, 216 (1-4) :330-334

[6]

RYU YR, 2000, UNPUB CRYSTAL GROWTH

← 1 →