Mircofabrication technology for polycaprolactone, a biodegradable polymer

被引:91
作者
Armani, DK [1 ]
Liu, C [1 ]
机构
[1] Univ Illinois, MASS Grp, Microelect Lab, Urbana, IL 61801 USA
关键词
D O I
10.1088/0960-1317/10/1/311
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we report the development of micromachining techniques for a biodegradable polymer for the first time. By virtue of their ability to naturally degrade in tissues, biodegradable polymers hold immense promise as new materials for implantable biomedical microdevices. This work focuses on the establishment of microfabrication processes for biodegradable microstructures and microdevices. Three unique fabrication processes have been established: (1) a micro-molding process to form 3D microstructures in polycaprolactone (PCL) via a silicon micromachined mold, (2) a method of transferring metal patterns to surfaces of PCL substrates, (3) techniques for sealing both dry and liquid-filled PCL micro-cavities with a metal thin Nm (e.g. gold). The chemical compatibility of PCL with common micromachining chemicals have been investigated.
引用
收藏
页码:80 / 84
页数:5
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