A frequency-domain thermoreflectance method for the characterization of thermal properties

被引：396

作者：

Schmidt, Aaron J. ^{[1
,2
]}

Cheaito, Ramez ^{[2
]}

Chiesa, Matteo ^{[2
]}

机构：

[1] MIT, Dept Mech Engn, Cambridge, MA 02139 USA

[2] Masdar Inst Sci & Technol, Dept Mech Engn, Abu Dhabi, U Arab Emirates

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2009年 / 80卷 / 09期

关键词：

LAYERED STRUCTURES; CONDUCTIVITY; FILMS; MICROSCOPY;

D O I：

10.1063/1.3212673

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A frequency-domain thermoreflectance method for measuring the thermal properties of homogenous materials and submicron thin films is described. The method can simultaneously determine the thermal conductivity and heat capacity of a sample, provided the thermal diffusivity is greater than or similar to 3 x 10(-6) m(2)/s, and can also simultaneously measure in-plane and cross-plane thermal conductivities, as well the thermal boundary conductance between material layers. Two implementations are discussed, one based on an ultrafast pulsed laser system and one based on continuous-wave lasers. The theory of the method and an analysis of its sensitivity to various thermal properties are given, along with results from measurements of several standard materials over a wide range of thermal diffusivities. We obtain specific heats and thermal conductivities in good agreement with literature values, and also obtain the in-plane and cross-plane thermal conductivities for crystalline quartz. (C) 2009 American Institute of Physics. [doi:10.1063/1.3212673]

引用

页数：6

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