Observation of ring-shaped pulsed DC discharge plasma source using single pole magnet setups for material processing

被引:0
|
作者
Hossain, Md. Amzad [1 ,2 ]
Patwary, M. A. Majed [1 ]
Bhuiyan, M. M. Rahman [3 ]
Nakamura, Yutaro [1 ]
Sugawara, Kosei [1 ]
Ohtsu, Yasunori [1 ]
机构
[1] Saga Univ, Grad Sch Sci & Engn, Dept Elect & Elect Engn, Saga, Japan
[2] Jashore Univ Sci & Technol, Dept Elect & Elect Engn, Jashore, Bangladesh
[3] Saga Univ, Dept Phys, Fac Sci & Engn, Saga, Japan
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 2019年 / 174卷 / 5-6期
基金
日本学术振兴会;
关键词
Pulsed DC discharge; single pole magnet setup; magnetized; ring-shaped plasma; ion saturation currents; THIN-FILMS TREATMENT; HIGH-DENSITY; DEPOSITION; POWER; TEMPERATURE; ARGON; STATE; TIME;
D O I
10.1080/10420150.2019.1596105
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
A pulsed direct current (DC) discharge ring-shaped plasma source has been proposed using single pole magnet arrangements, including a center magnet, with magnets in the setups (a): one circle, (b): two circles, and (c): three circles. The three-dimensional (3D) magnetic flux lines profiles, gyro-radii and Hall parameters of the electrons and ions, the electrical discharge characteristics, thetemporal evolutions of the ion saturation currents were investigated to characterize the proposed plasma source. The calculated electron gyro-radii, r(e) were 0.17, 1.64, 5.82mm for setups (a), (b), and (c), respectively. The strong ring-shaped plasma discharges was observed for all setups. The typical discharge voltages were 1.0, 0.6, and 0.6kV for setups (a), (b), and (c), respectively. The ion saturation currents, I-isat were 1.44, 2.88, and 2.2mA for setups (a), (b), and (c), respectively at r=45mm and t=+10 mu s. The I-isat of setup (b) is less fluctuating, whereas I-isat of setup (a) and (c) is highly variable in all positions, so that setup (b) has the best profile among the setups.
引用
收藏
页码:380 / 396
页数:17
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