Spontaneous Patterning of Surfaces by Low-Energy Ion Beams

被引：20

作者：

Chason, Eric ^{[1
]}

Chan, Wai Lun ^{[2
]}

机构：

[1] Brown Univ, Div Engn, Providence, RI 02912 USA

[2] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

来源：

MATERIALS SCIENCE WITH ION BEAMS | 2010年 / 116卷

关键词：

ROUGHENING INSTABILITY; MORPHOLOGY; EVOLUTION; BOMBARDMENT; DIFFUSION; NANOSTRUCTURES; PT(111); YIELD;

D O I：

10.1007/978-3-540-88789-8_3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Pattern formation by low-energy ion beams results from a balance among different kinetic processes on the surface. Some increase the roughness of the surface (e.g., sputtering) while others tend to smoothen the surface (e.g., diffusion) and the interaction between them leads to the development of a, characteristic periodicity on the surface. In this chapter, we describe the different physical mechanisms that contribute to sputter ripple formation and their dependence on the processing parameters of flux and temperature. This is used to develop a linear instability model that call be applied to understanding the different features of patterning that are found tinder different processing conditions.

引用

页码：53 / 71

页数：19

共 62 条

[1] Focused ion beam milling of diamond:: Effects of H2O on yield, surface morphology and microstructure [J].