Mechanical properties and wear resistance of TaN/NbN nano-multilayers

被引:10
作者
Yu, XJ [1 ]
Lai, QX [1 ]
Li, GY [1 ]
Xu, JH [1 ]
Gu, MY [1 ]
机构
[1] Shanghai Jiao Tong Univ, State Key Lab Met Matrix Composites, Shanghai 200030, Peoples R China
关键词
D O I
10.1023/A:1020872625561
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The mechanical properties and wear resistance of TaN/NbN nano-multilayers were studied. TaN/NbN multilayers was found to exhibit superior wear resistance with respect to TaN or NbN single-layer films. The results showed that the superhardness effects of TaN/NbN multilayers exit in a wide range of modulation periods from 2.3 to 17.0 nm and the maximum hardness was observed at 51.0 GPa.
引用
收藏
页码:1671 / 1673
页数:3
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