Study of thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique

被引：0

作者：

Yuan, YF ^{[1
]}

Zhu, QY ^{[1
]}

Chen, BX ^{[1
]}

Fu, CS ^{[1
]}

Li, P ^{[1
]}

机构：

[1] Shanghai Univ Sci & Technol, Shanghai 200093, Peoples R China

来源：

APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS, OPTIAL FIBER AND PLANAR WAVEGUIDE TECHNOLOGY II | 2002年 / 4904卷

关键词：

thermo-optic dispersion; aluminum nitride; waveguides measurement;

D O I：

10.1117/12.481263

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An aluminum nitride thin film on sapphire substrate was prepared by metal-organic chemical-vapor deposition for optical waveguide study. In order to investigate thermo-optic dispersion properties of aluminum nitride waveguide, a new experimental arrangement is designed. The thermo-optic properties of thin film are obtained using a prism coupled waveguide devices, which has auto-temperature controlling system. The temperature range is 30degreesC - 85degreesC with the control accuracy of +1degreesC. The experiment was carried out by using different light source with wavelength of 441.6 nm, 514.5 nm, and 632.8 nm. A set of curve of thermo-optic dispersion of aluminum nitride film is given.

引用

页码：458 / 461

页数：4