Blind phase shift estimation in phase-shifting interferometry

被引：30

作者：

Guo, Hongwei ^{[1
]}

Yu, Yingjie ^{[1
]}

Chen, Mingyi ^{[1
]}

机构：

[1] Shanghai Univ, Dept Precis Mech Engn, Lab Appl Opt & Metrol, Shanghai 200072, Peoples R China

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2007年 / 24卷 / 01期

关键词：

D O I：

10.1364/JOSAA.24.000025

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A blind phase shift estimation algorithm that allows simultaneous calculation of phases and phase shifts from three or more interferograms is presented. In phase-shifting interferometry, the phase shift errors introduce specific correlations between the calculated background intensity distribution and the fringe component. These correlations can be measured with a cross-power spectrum. By minimization of an objective function based on this cross-power spectrum, the actual phase shifts are estimated and used for phase recovery. The validity of this algorithm is verified by both the numerical simulation and the experiment results. (c) 2006 Optical Society of America.

引用

页码：25 / 33

页数：9

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