Characterization and Modeling of Capacitive Micromachined Ultrasound Transducers for Diagnostic Ultrasound

被引：0
|
作者：
Doody, C. B. [1 ]
Wadhwa, J. S. [2 ]
Lemmerhirt, D. F. [2 ]
White, R. D. [1 ]
机构：
[1] Tufts Univ, Medford, MA 02155 USA
[2] Sonet Ultrasound Inc, Ann Arbor, MI 48108 USA
来源：
NSTI NANOTECH 2008, VOL 3, TECHNICAL PROCEEDINGS: MICROSYSTEMS, PHOTONICS, SENSORS, FLUIDICS, MODELING, AND SIMULATION | 2008年
关键词：
cMUT; MEMS; FEA; LDV; ultrasound;
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
This paper describes the characterization and modeling of capacitive micromachined ultrasonic transducers (cMUTs). Combining the use of finite element analysis (FEA) and lumped element modeling, computational models of the transducers were produced. Frequency response plots were generated for both transducers in air and water environments. Transient step response and frequency sweep tests were performed on single array elements using laser Doppler velocimetry. These measurements are compared to model predictions. The computational results for coupled and uncoupled arrays are compared, and show a significant increase in the array bandwidth due to coupling.
引用
收藏
页码：627 / +
页数：2
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