Nanophotonics Sensor Based on Microcantilever for Chemical Analysis

被引：30

作者：

Xiang, Wenfeng ^{[1
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2009年 / 15卷 / 05期

关键词：

MEMS; microcantilever; nanomechanical sensor; NEMS; photonic crystal resonator; SCANNING FORCE MICROSCOPY; PZT MICROCANTILEVERS; PHOTONIC CRYSTALS; DEFLECTION;

D O I：

10.1109/JSTQE.2009.2016578

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z-displacement and strain of Si/SiO2 cantilever sensor are derived as 0.6 mu m and 0.0098% in water and 0.812 mu m and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution.

引用

页码：1323 / 1326

页数：4

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