Chemical vapour deposition synthetic diamond: materials, technology and applications

被引:361
作者
Balmer, R. S. [1 ]
Brandon, J. R. [1 ]
Clewes, S. L. [1 ]
Dhillon, H. K. [1 ]
Dodson, J. M. [1 ]
Friel, I. [1 ]
Inglis, P. N. [1 ]
Madgwick, T. D. [1 ]
Markham, M. L. [1 ]
Mollart, T. P. [1 ]
Perkins, N. [1 ]
Scarsbrook, G. A. [1 ]
Twitchen, D. J. [1 ]
Whitehead, A. J. [1 ]
Wilman, J. J. [1 ]
Woollard, S. M. [1 ]
机构
[1] Element Six Ltd, Ascot SL5 8BP, Berks, England
关键词
LARGE-AREA DEPOSITION; CRYSTAL CVD-DIAMOND; SINGLE-CRYSTAL; POLYCRYSTALLINE DIAMOND; HIGH-MOBILITY; OPTICAL-EMISSION; ELECTRICAL-PROPERTIES; INFRARED-ABSORPTION; THERMAL MANAGEMENT; DISK LASERS;
D O I
10.1088/0953-8984/21/36/364221
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Substantial developments have been achieved in the synthesis of chemical vapour deposition (CVD) diamond in recent years, providing engineers and designers with access to a large range of new diamond materials. CVD diamond has a number of outstanding material properties that can enable exceptional performance in applications as diverse as medical diagnostics, water treatment, radiation detection, high power electronics, consumer audio, magnetometry and novel lasers. Often the material is synthesized in planar form; however, non-planar geometries are also possible and enable a number of key applications. This paper reviews the material properties and characteristics of single crystal and polycrystalline CVD diamond, and how these can be utilized, focusing particularly on optics, electronics and electrochemistry. It also summarizes how CVD diamond can be tailored for specific applications, on the basis of the ability to synthesize a consistent and engineered high performance product.
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页数:23
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