Reduced-order modeling of capacitive MEMS microphones using mixed-level simulation

We demonstrate a reduced-order modeling methodology based on the mixed-level simulation approach that allows for the rapid evaluation of microphone design variations with arbitrary arrangement and shape of the acoustic holes. The resulting reduced-order models take multiply coupled energy domains into account and are capable of describing the effects caused by non-linear fluidic damping. The methodology is easily approachable, as the generation of the reduced-order models is automated by the use of a MATLAB toolbox.