Excitation of hypersonic acoustic waves in diamond-based piezoelectric layered structure on the microwave frequencies up to 20 GHz

被引：22

作者：

Sorokin, B. P. ^{[1
,2
]}

Kvashnin, G. M. ^{[1
]}

Novoselov, A. S. ^{[1
,2
]}

Bormashov, V. S. ^{[1
]}

Golovanov, A. V. ^{[1
]}

Burkov, S. I. ^{[3
]}

Blank, V. D. ^{[1
,2
]}

机构：

[1] Technol Inst Superhard & Novel Carbon Mat, Troitsk 108840, Russia

[2] Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Russia

[3] Siberian Fed Univ, Krasnoyarsk 660041, Russia

来源：

ULTRASONICS | 2017年 / 78卷

基金：

俄罗斯科学基金会;

关键词：

Diamond; Piezoelectric layered structure; HBAR; Aluminum nitride; Quality factor; Quality parameter; UHF acoustic attenuation; RESONATORS; ATTENUATION; CRYSTAL;

D O I：

10.1016/j.ultras.2017.01.014

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

First ultrahigh frequency (UHF) investigation of quality factor Q for the piezoelectric layered structure << Al/(001)AlN/Mo/(100) diamond has been executed in a broad frequency band from 1 up to 20 GHz. The record-breaking Q.f quality parameter up to 2.7 . 10(14)Hz has been obtained close to 20 GHz. Frequency dependence of the form factor m correlated with quality factor has been analyzed by means of computer simulation, and non-monotonic frequency dependence can be explained by proper features of thin-film piezoelectric transducer (TFPT). Excluding the minimal Q magnitudes measured at the frequency points associated with minimal TFPT effectiveness, one can prove a rule of Of similar to f observed for diamond on the frequencies above 1 GHz and defined by Landau-Rumer's acoustic attenuation mechanism. Synthetic IIa-type diamond single crystal as a substrate material for High-overtone Bulk Acoustic Resonator (HBAR) possesses some excellent acoustic properties in a wide microwave band and can be successfully applied for design of acoustoelectronic devices, especially the ones operating at a far UHF band. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：162 / 165

页数：4

共 10 条

[1] Excitation of Surface Acoustic Waves and Lamb Waves at Superhigh Frequencies in a Diamond-Based Piezoelectric Layered Structure
G. M. Kvashnin
B. P. Sorokin
S. I. Burkov
Acoustical Physics, 2021, 67 : 38 - 46
[2] Excitation of Surface Acoustic Waves and Lamb Waves at Superhigh Frequencies in a Diamond-Based Piezoelectric Layered Structure
Kvashnin, G. M.
Sorokin, B. P.
Burkov, S. I.
ACOUSTICAL PHYSICS, 2021, 67 (01) : 38 - 46
[3] Peculiarities of energy trapping of the UHF elastic waves in diamond-based piezoelectric layered structure. I. Waveguide criterion
Kvashnin, G. M.
Sorokin, B. P.
Novoselov, A. S.
ULTRASONICS, 2018, 84 : 101 - 106
[4] Lamb waves dispersion curves for diamond based piezoelectric layered structure
Sorokin, B. P.
Kvashnin, G. M.
Telichko, A. V.
Novoselov, A. S.
Burkov, S. I.
APPLIED PHYSICS LETTERS, 2016, 108 (11)
[5] Peculiarities of energy trapping of the UHF elastic waves in diamond-based piezoelectric layered structure. II. Lateral energy flow
Kvashnin, G. M.
Sorokin, B. P.
ULTRASONICS, 2021, 111
[6] 8 GHz microwave filters based on bulk acoustic waves in piezoelectric AlN thin films
Lanz, R
Muralt, P
ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, 2002, : 137 - 140
[7] Analysis of the metal layer thickness influence on the dispersion characteristics of acoustic waves propagating in the layered piezoelectric structure "Me/AlN/Me/diamond"
Burkov, S. I.
Zolotova, O. P.
Sorokin, B. P.
ULTRASONICS, 2018, 83 : 188 - 193
[8] 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography
Kirsch, P.
Assouar, M. B.
Elmazria, O.
Mortet, V.
Alnot, P.
APPLIED PHYSICS LETTERS, 2006, 88 (22)
[9] Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure
Sorokin, B. P.
Kvashnin, G. M.
Telichko, A. V.
Gordeev, G. I.
Burkov, S. I.
Blank, V. D.
ACOUSTICAL PHYSICS, 2015, 61 (04) : 422 - 433
[10] Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure
B. P. Sorokin
G. M. Kvashnin
A. V. Telichko
G. I. Gordeev
S. I. Burkov
V. D. Blank
Acoustical Physics, 2015, 61 : 422 - 433

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