Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

被引：30

作者：

Walker, AV ^{[1
]}

Winograd, N ^{[1
]}

机构：

[1] Penn State Univ, Dept Chem, Mat Res Inst 184, University Pk, PA 16802 USA

来源：

APPLIED SURFACE SCIENCE | 2003年 / 203卷

关键词：

SIMS; Au ion sources; imaging; sputtered ion yields;

D O I：

10.1016/S0169-4332(02)00624-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au++, Au+ or Au-2(+) primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au++ ion bombardment may yield improved spectra for certain types of compounds. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：198 / 200

页数：3

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