High-Quality Surface Micromachining on Polymer Using Visible-LIBWE

被引:2
作者
Cheng, Ji-Yen [1 ,2 ,3 ,4 ,5 ]
Kao, Wei-Chen [1 ]
Mousavi, Mansoureh Z. [1 ]
Chang, Hui-Fang [1 ]
Hsu, Wen-Chi [1 ]
Yen, Meng-Hua [1 ]
Ehrhardt, Martin [6 ]
Zimmer, Klaus [6 ]
机构
[1] Acad Sinica, Res Ctr Appl Sci, Taipei 11529, Taiwan
[2] Natl Yang Ming Univ, Inst Biophoton, Taipei 11221, Taiwan
[3] Natl Yang Ming Univ, BMIRC, Taipei 11221, Taiwan
[4] Natl Taiwan Ocean Univ, Dept Mech & Mechatron Engn, Keelung 20224, Taiwan
[5] Natl Chung Hsing Univ, PhD Program Microbial Genom, Taichung 402, Taiwan
[6] Leibniz Inst Oberflachenmodifizierung eV, Permoserstr 15, D-04318 Leipzig, Germany
来源
JOURNAL OF LASER MICRO NANOENGINEERING | 2016年 / 11卷 / 01期
关键词
visible LIBWE; v-LIBWE; PMMA; laser etching; liquid-assisted; direct-writing; nanosecond; Indium Gallium eutectic; MICROFLUIDIC CHIP; FUSED-SILICA; LASER; EMISSION; GALLIUM; DEVICE; PMMA;
D O I
10.2961/jlmn.2016.01.0022
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This work describes optically smooth high quality surface machining on poly methyl methacrylate (PMMA) using simple visible-LIBWE (laser induced back-side wet etching using visible laser, v-LIBWE). Micromachining of polymer such as PMMA usually utilizes CO2 lasers. However, minimal feature smaller than 100 mu m is difficult to achieve and that the surface quality is not good. Using ultra-violet (UV) laser direct ablation reduces the minimal feature to be below 20 mu m but the surface roughness is also not satisfactory (several mu m). Here we demonstrated that high surface quality etching on PMMA was achievable by v-LIBWE using low power nanosecond 532 nm laser. The etching threshold is similar to 50 J/cm(2), which corresponded to similar to 2 mW at 1 kHz repetition rate. Using pulse repetition rate of 1 kHz, trench depth saturated at about 2 mu m. Deeper trench (similar to 5 mu m) is achievable using 30 kHz repetition rate but the process is not consistent and that discontinued trench was often observed. A perspective on the future development of v-LIEBWE on polymer substrate was given.
引用
收藏
页码:117 / 123
页数:7
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