THE PROCESS OPTIMIZATION OF CONDUCTIVE POLYMER ELECTRODES OF AT-CUT QUARTZ CRYSTAL RESONATORS

被引：0

作者：

Xie, Miao-miao ^{[1
]}

Fang, Xing-zhong ^{[2
]}

Chen, Guo-fei ^{[2
]}

Jiang, Han-zhou ^{[2
]}

Tan, Li-yun ^{[2
]}

Shen, Jun-nan ^{[3
]}

Wang, Xi-xi ^{[3
]}

Yi, Li-jun ^{[1
]}

Wang, Ji ^{[1
]}

机构：

[1] Ningbo Univ, Sch Mech Engn & Mech, Piezoelect Device Lab, 818 Fenghua Rd, Ningbo 315211, Zhejiang, Peoples R China

[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo Key Lab Polymer Mat, 1219 Zhongguan Rd, Ningbo 315211, Zhejiang, Peoples R China

[3] TXC Ningbo Corp, 189 Huangshan West Rd, Ningbo 315800, Zhejiang, Peoples R China

来源：

2022 16TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS, SPAWDA | 2022年

关键词：

Quartz; Resonators; Electrodes; Conductive polymers; Metals; POLY(3,4-ETHYLENEDIOXYTHIOPHENE);

D O I：

10.1109/SPAWDA56268.2022.10045934

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Quartz crystal resonators are widely used in today's communication devices and systems and are core elements for signal processing with a wide range of applications. As quartz crystal resonators move toward miniaturization and high frequency, the electrode material and size have a significant impact on their performance. In order to avoid the gravitational effect of metal density and the resulting frequency shift, electrodes based on PEDOT/ PSS conductive polymers have been proven with great potential, and concerns about the resistance of conductive polymer electrode resonators at this stage have to be addressed. Therefore, it is urgent to optimize the processing technology of the conductive polymer electrodes and improve their performance consequently. Through recent efforts, the impedance of conductive polymer quartz crystal resonators has been reduced to about 4 times that of metal electrode resonators, and the quality factor has also been improved significantly.

引用

页码：788 / 791

页数：4

共 22 条

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