THE PROCESS OPTIMIZATION OF CONDUCTIVE POLYMER ELECTRODES OF AT-CUT QUARTZ CRYSTAL RESONATORS

被引：0

作者：

Xie, Miao-miao ^{[1
]}

Fang, Xing-zhong ^{[2
]}

Chen, Guo-fei ^{[2
]}

Jiang, Han-zhou ^{[2
]}

Tan, Li-yun ^{[2
]}

Shen, Jun-nan ^{[3
]}

Wang, Xi-xi ^{[3
]}

Yi, Li-jun ^{[1
]}

Wang, Ji ^{[1
]}

机构：

[1] Ningbo Univ, Sch Mech Engn & Mech, Piezoelect Device Lab, 818 Fenghua Rd, Ningbo 315211, Zhejiang, Peoples R China

[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo Key Lab Polymer Mat, 1219 Zhongguan Rd, Ningbo 315211, Zhejiang, Peoples R China

[3] TXC Ningbo Corp, 189 Huangshan West Rd, Ningbo 315800, Zhejiang, Peoples R China

来源：

2022 16TH SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS, SPAWDA | 2022年

关键词：

Quartz; Resonators; Electrodes; Conductive polymers; Metals; POLY(3,4-ETHYLENEDIOXYTHIOPHENE);

D O I：

10.1109/SPAWDA56268.2022.10045934

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Quartz crystal resonators are widely used in today's communication devices and systems and are core elements for signal processing with a wide range of applications. As quartz crystal resonators move toward miniaturization and high frequency, the electrode material and size have a significant impact on their performance. In order to avoid the gravitational effect of metal density and the resulting frequency shift, electrodes based on PEDOT/ PSS conductive polymers have been proven with great potential, and concerns about the resistance of conductive polymer electrode resonators at this stage have to be addressed. Therefore, it is urgent to optimize the processing technology of the conductive polymer electrodes and improve their performance consequently. Through recent efforts, the impedance of conductive polymer quartz crystal resonators has been reduced to about 4 times that of metal electrode resonators, and the quality factor has also been improved significantly.

引用

页码：788 / 791

页数：4

共 50 条

[1] AT-cut quartz resonators with inverted-mesa electrodes
Hirama, K
Aoyama, Y
Naito, M
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (10): : 6432 - 6436
[2] Energy trapping behavior of AT-cut quartz crystal resonators with a groove ring on main electrodes
Hirama, K
Aoyama, Y
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART III-FUNDAMENTAL ELECTRONIC SCIENCE, 1999, 82 (04): : 48 - 55
[3] Modeling quality factor in AT-cut quartz-crystal resonators
Silva, Leonardo B. M.
Santos, Edval J. P.
2013 28TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2013), 2013,
[4] Quartz Crystal Resonators with Electrodes of Conductive Polymers
Zhang, Yangyang
Xu, Lubo
Fang, Xingzhong
Wang, Xixi
Shen, Julian
Tian, Hao
Wang, Ji
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2019, : 1670 - 1673
[5] ON TRAPPED-WAVE CRITERION FOR AT-CUT QUARTZ RESONATORS WITH COATED ELECTRODES
HORTON, WH
SMYTHE, RC
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (04): : 598 - &
[6] STUDY OF THE NONLINEAR EFFECTS ON TRANSIENT PROCESS IN AT-CUT QUARTZ RESONATORS
Li, Nian
Qian, Zheng-hua
Yang, Jia-shi
2014 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES, AND DEVICE APPLICATIONS (SPAWDA), 2014, : 166 - 169
[7] THE MOTIONAL CAPACITANCE OF AT-CUT QUARTZ RESONATORS
VANDYKE, KS
PHYSICAL REVIEW, 1950, 78 (05): : 642 - 642
[8] ACOUSTIC MODES OF AT-CUT QUARTZ RESONATORS
BUKSHTAT, BM
KARAULNIK, AE
SOVIET PHYSICS ACOUSTICS-USSR, 1983, 29 (04): : 263 - 266
[9] Suppression of lower harmonic responses on overtone AT-cut quartz crystal resonators
Hirama, K
Shoji, T
Tanaka, Y
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART III-FUNDAMENTAL ELECTRONIC SCIENCE, 2000, 83 (04): : 92 - 102
[10] Electrical behaviour of AT-cut quartz crystal resonators as a function of overtone number
Cassiede, M.
Paillol, J. H.
Pauly, J.
Daridon, J. -L.
SENSORS AND ACTUATORS A-PHYSICAL, 2010, 159 (02) : 174 - 183

← 1 2 3 4 5 →