Room Temperature CO2 Detection using Interdigitated Capacitors with Heteropolysiloxane Sensing Films

被引：0

作者：

Kim, Choongsoon ^{[1
]}

Pavlidis, Spyridon ^{[1
]}

Kim, Min-gu ^{[1
]}

Brand, Oliver ^{[1
]}

Chen, Hang ^{[2
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

[2] Georgia Inst Technol, Inst Elect & Nanotechnol, Atlanta, GA 30332 USA

来源：

2016 IEEE SENSORS | 2016年

基金：

美国国家科学基金会;

关键词：

capacitive sensor; CO2; amino group; SENSORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper investigates the detection of carbon dioxide at room temperature using microfabricated, interdigitated capacitive (IDC) sensors coated with an amino-functionalized sensing film. Sensing experiments performed at temperatures ranging from room temperature to 100 degrees C indicate two different temperature-dependent sensing mechanisms. Around room temperature, physisorption dominates the sensor response, resulting in fast signal transients and negative capacitance changes. Above 80 degrees C, chemisorption appears to dominate, resulting in larger, positive capacitance changes with longer signal transients.

引用

页数：3

共 13 条

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