Projective phase diagrams for CVD diamond growth from C-H and C-H-O systems

被引：1
作者：
Liu, ZJ [1 ]
Zhang, DW
Wang, PF
Ding, SJ
Zhang, JY
Wang, JT
Kohse-Hoinghaus, K
机构：
[1] Fudan Univ, Dept Elect Engn, CVD Lab, Shanghai 200433, Peoples R China
[2] Univ Bielefeld, D-33615 Bielefeld, Germany
来源：
THIN SOLID FILMS | 2000年 / 368卷 / 02期
基金：
中国国家自然科学基金;
关键词：
non-equilibrium thermodynamics; phase diagram; diamond; chemical vapor deposition;
D O I：
10.1016/S0040-6090(00)00776-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Phase diagrams for chemical vapor deposition (CVD) diamond growth from C-H and C-H-O systems were calculated according to the non-equilibrium thermodynamic coupling model. As compared with a large quantity of experimental facts, the theoretical predictions agreed well with the experiments. The theoretical results can not only solve the conflict between the classical equilibrium thermodynamics and CVD diamond growth under low pressure, but also give quantitative predictions for optimizing experimental conditions. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：253 / 256
页数：4
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