IDT-based Acoustic Wave Devices Using Ultrathin Lithium Niobate and Lithium Tantalate

被引：0
|
作者：
Tanaka, Shuji [1 ]
Kadota, Michio [1 ]
机构：
[1] Tohoku Univ, Dept Robot, Sendai, Miyagi, Japan
来源：
2020 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IFCS-ISAF) | 2020年
关键词：
SAW; plate wave; SH0; mode; A(1) mode; LSAW; HAL SAW;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Ultrathin lithium niobite (LN) and lithium tantalate (LT) have opened a new era of acoustic wave devices. The performances such as impedance ratio, bandwidth and temperature stability of new types of devices are incredibly high compared with those of conventional ones. The R&D is showing a kind of boom in both industry and academia. In this paper, plate wave devices and HAL (Hetero Acoustic Layer) SAW (surface acoustic wave) devices using ultrathin LN or LT developed by the authors' group are described.
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