Integration of III-V on Silicon Gain Devices At the Backside of Silicon-on-Insulator Wafers For Photonic Fully Integrated Circuits

被引:0
作者
Menezo, Sylvie [1 ,2 ]
Thiessen, Torrey [3 ]
Mak, Jason [3 ,4 ]
Fonseca, Jeremy [2 ]
Ribaud, Karen [2 ]
Yong, Zheng [3 ,4 ]
Jany, Christophe [2 ]
Poon, Joyce K. S. [3 ,4 ]
机构
[1] SCINTIL Photon, 7 Purvis Louis Neel, F-38040 Grenoble, France
[2] CFA Leti, 17 Rue Martyrs, F-38000 Grenoble, France
[3] Univ Toronto, Dept Elect & Comp Engn, 10 Kings Coll Rd, Toronto, ON M5S 3G4, Canada
[4] Max Planck Inst Microstruct Phys, Weinberg 2, D-06120 Halle, Saale, Germany
来源
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
关键词
LASER;
D O I
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a new platform integrating heterogeneous III-V/silicon gain devices at the backside of silicon-on-insulator wafers. The fabrication relies on commercial silicon photonic processes. The performances of lasers and SOAs fabricated accordingly are reported. (C) 2020 The Author(s) sylvie.menezo@scintil-photonics.com
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页数:2
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