Two-dimensional simulation of nanoassembly precursor species in Ar+H2+C2H2 reactive plasmas

被引：75

作者：

Ostrikov, Kostya ^{[1
]}

Yoon, Hyun-Jin ^{[1
]}

Rider, Amanda E. ^{[1
]}

Vladimirov, Sergey V. ^{[1
]}

机构：

[1] Univ Sydney, Sch Phys, Plasma Nanosci Complex Syst, Sydney, NSW 2006, Australia

来源：

PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷 / 01期

关键词：

acetylene; inductively coupled plasmas; modeling; nanofabrication; plasma-enhanced chemical vapor deposition (PECVD); synthesis;

D O I：

10.1002/ppap.200600070

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The results of two-dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon-based nanopatterns in Ar+H-2+C2H2 reactive plasmas are reported. It is shown that the process parameters and non-uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma-aided nanofabrication processes and optimize the parameters of plasma nanotools.

引用

页码：27 / 40

页数：14

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