Amorphous film thickness dependence for epitaxy of perovskite oxide films under excimer laser irradiation

被引：6

作者：

Nakajima, Tomohiko ^{[1
]}

Tsuchiya, Tetsuo

Ichihara, Masaki ^{[2
]}

Nagai, Hideaki

Kumagai, Toshiya

机构：

[1] Natl Inst Adv Ind Sci & Technol, Adv Mfg Res Inst, Tsukuba, Ibaraki 3058565, Japan

[2] Univ Tokyo, Mat Design & Characterizat Lab, Inst Solid State Phys, Chiba 2778581, Japan

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 24期

关键词：

Excimer laser assisted metal organic deposition; Epitaxial growth; Low temperature fabrication; THIN-FILMS; FABRICATION; EVOLUTION; GROWTH;

D O I：

10.1016/j.apsusc.2009.04.068

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have studied the epitaxial growth of perovskite manganite LaMnO3 (LMO) on SrTiO3(1 0 0) in the excimer laser assisted metal organic deposition process. The LMO was preferentially grown from the substrate surface by the KrF laser irradiation. The study of amorphous LMO film thickness dependence on epitaxial growth under the excimer laser irradiation revealed that the photo-thermal heating effect strongly depended on the amorphous film thickness due to a low thermal conductivity of amorphous LMO: the ion-migration for chemical bond-forming at the reaction interface would be strongly enhanced in the amorphous LMO film with the large film thickness about 210 nm. On the other hand, the photochemical effect occurred efficiently for the amorphous film thickness in the range of 35-210 nm. These results indicate that the epitaxial growing rate was dominated by the photo-thermal heating after the photo-chemical activation at the growth interface. (C) 2009 Elsevier B. V. All rights reserved.

引用

页码：9775 / 9778

页数：4

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