Ultrasonic Gas Sensing by Two-Dimensional Surface Phononic Crystal Ring Resonators

被引：34

作者：

Cicek, Ahmet ^{[1
]}

Trak, Digdem ^{[2
]}

Arslan, Yasin ^{[1
]}

Korozlu, Nurettin ^{[1
]}

Kaya, Olgun A. ^{[3
]}

Ulug, Bulent ^{[4
]}

机构：

[1] Burdur Mehmet Akif Ersoy Univ, Fac Arts & Sci, Dept Nanosci & Nanotechnol, TR-15030 Burdur, Turkey

[2] Burdur Mehmet Akif Ersoy Univ, Fac Arts & Sci, Dept Chem, TR-15030 Burdur, Turkey

[3] Inonu Univ, Fac Educ, Dept Comp Educ & Educ Technol, TR-44280 Malatya, Turkey

[4] Akdeniz Univ, Fac Sci, Dept Phys, TR-07058 Antalya, Turkey

来源：

ACS SENSORS | 2019年 / 4卷 / 07期

关键词：

ultrasonic gas sensors; Helmholtz cavity; phononic crystal; ring resonator; finite-element method; FLUORESCENT CHEMOSENSOR; SENSOR SYSTEM; METHANE; CO2; SOUND;

D O I：

10.1021/acssensors.9b00865

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An acoustic ring resonator employing a two-dimensional surface phononic crystal is proposed for high-sensitivity detection in binary gas mixtures. Band analyses and frequency-domain simulations via the finite-element method reveal that a single band for spoof surface acoustic waves appears at ultrasonic frequencies around 58 kHz where modification of its dispersion due to varying gas composition results in a linear shift of the resonance frequency. The shift rate is -17.3 and 8.8 mHz/ppm for CO2 and CH4, respectively. The linear shift of resonance frequency is experimentally validated. In addition, the ring resonator can also be employed to track acoustic intensity variation with gas concentration, where exponentially decaying intensity for low concentrations leverages high-sensitivity operation.

引用

页码：1761 / 1765

页数：9

共 35 条

[1] Synthesis and study of the structure, magnetic, optical and methane gas sensing properties of cobalt doped zinc oxide microstructures [J].