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机构:
Univ Freiburg, Dept Microsyst Engn IMTEK, Fritz Huettinger Chair Microelect, Hugstetter Str 55, D-79106 Freiburg, Germany
HSG IMIT Inst Micromachining & Informat Technol, Villingen Schwenningen, Germany Univ Freiburg, Dept Microsyst Engn IMTEK, Fritz Huettinger Chair Microelect, Hugstetter Str 55, D-79106 Freiburg, Germany