Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique

被引：0

作者：

Yang, Lili ^{[1
]}

Ge, Dengteng ^{[1
]}

Wei, Hua ^{[1
]}

Zhao, Huijie ^{[2
]}

He, Fei ^{[1
]}

He, Xiaodong ^{[1
]}

机构：

[1] Harbin Inst Technol, Sch Astronaut, Ctr Composite Mat & Struct, Harbin 150080, Peoples R China

[2] Harbin Inst Technol, Space Mat & Environm Engn Lab, Harbin 150001, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 19期

关键词：

Sol-gel film; Surface roughness; X-ray reflectivity; First Born approximation; SCATTERING;

D O I：

10.1016/j.apsusc.2009.05.045

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

As an excellent optical or photoelectric material, indium tin oxide (ITO) film was prepared by sol-gel dip-coating and subsequent annealing process. X-ray reflectivity measurement based on the first Born approximation theory was performed for the characterization of surface roughness of ITO film. It is found that the roughness can be described as self-affined over finite length scales and the surface roughness increases with the annealing temperature or holding time. The results were compared with complementary data obtained by atomic force microscope tests and it is found that they match very well. The first Born approximation theory provides a valuable tool for the rough surface characterization of sol-gel films/coating through X-ray reflectivity technique. (C) 2009 Elsevier B. V. All rights reserved.

引用

页码：8226 / 8229

页数：4

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