A multi-dimensional kinetic simulation for nano-scale semiconductor devices

被引:0
作者
Fedoseyev, A [1 ]
Kolobov, V [1 ]
Yang, HQ [1 ]
Jiang, Y [1 ]
Przekwas, A [1 ]
机构
[1] CFD Res Corp, Huntsville, AL 35805 USA
来源
QUANTUM CONFINEMENT VI: NANOSTRUCTURED MATERIALS AND DEVICES | 2001年 / 2001卷 / 19期
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D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We describe the details of numerical implementation of the multidimensional kinetic solver using kinetic and total energy domains. This solver provides a substantially lower computational cost than the Monte Carlo method, and resolves all points in phase space with equal accuracy. The effect of quantum corrections on spatial distribution of carriers is analyzed. Simulation results for an ultra-small MOSFET will be presented.
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页码:88 / 89
页数:2
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