Optical filters fabricated in hybrimer media with soft lithography

被引：21
作者：
Lee, Kyu J. [2 ]
Jin, Jungho [3 ]
Bae, Byeong-Soo [3 ]
Magnusson, Robert [1 ]
机构：
[1] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA
[2] Univ Connecticut, Dept Elect & Comp Engn, Storrs, CT 06269 USA
[3] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
来源：
OPTICS LETTERS | 2009年 / 34卷 / 16期
基金：
美国国家科学基金会;
关键词：
WAVE-GUIDE; PATTERN-TRANSFER; GRATINGS; DIFFRACTION; NANOIMPRINT;
D O I：
10.1364/OL.34.002510
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Fabrication and characterization of guided-mode resonance filters made by soft lithography are presented. As these resonant elements are highly sensitive to parametric variations, it is important to develop methods for their reliable fabrication. Thus, we provide a fabrication process that is consistent and simple, employing an elastomeric mold and a UV-curable organic-inorganic hybrid material. Measured spectra show similar to 81% reflectance and similar to 8% transmittance at a resonance wavelength of 1538 nm. The filter's linewidth is similar to 4.5 nm, and the sideband reflectance is similar to 5%. Experimental and theoretical results are in good agreement. (C) 2009 Optical Society of America
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页码：2510 / 2512
页数：3
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