Common-base operation of GaN bipolar junction transistors

被引:9
作者
Cao, XA [1 ]
Dang, GT
Zhang, AP
Ren, F
Abernathy, CR
Pearton, SJ
Van Hove, JM
Klaassen, JJ
Polley, CJ
Wowchack, AM
Chow, PP
King, DJ
Chu, SNG
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] SVT Associates, Eden Prairie, MN 55344 USA
[3] Lucent Technol, Bell Labs, Murray Hill, NJ 07974 USA
关键词
Current density - Dry etching - Electric breakdown of solids - Molecular beam epitaxy - Nitrides - Semiconducting gallium compounds - Semiconductor growth;
D O I
10.1149/1.1391140
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Common-base GaN bipolar junction transistors (50-100 mm emitter diam) were operated at current densities up to 3.6 kA cm(-2) and temperatures up to 300 degrees C. The devices were fabricated with a low damage, Cl-2/Ar dry etch process, and the structure was grown by molecular beam epitaxy. The reverse breakdown voltage of the base-collector junction decreased with increasing temperature in these unpassivated devices. Simulations show that the bipolar junction transistors are expected to have similar current gain to GaN/AlGaN heterojunction transistors at collector densities above similar to 500 A cm(-2). (C) 2000 The Electrochemical Society. S1099-0062(00)01-067-1. All rights reserved.
引用
收藏
页码:333 / 334
页数:2
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