A 2D model for radiation-hard CMOS annular transistors

被引:3
|
作者
Lopez, P. [1 ]
Blanco-Filgueira, B. [1 ]
Pardo, F. [2 ]
Cabello, D. [1 ]
Hauer, J. [3 ]
机构
[1] Univ Santiago de Compostela, Dept Elect & Comp Sci, Santiago De Compostela 15782, Spain
[2] Univ Valladolid, Dept Elect Technol, Valladolid 47014, Spain
[3] Fraunhofer Inst Integrated Circuits, D-91058 Erlangen, Germany
关键词
N-CHANNEL MOSFETS;
D O I
10.1088/0268-1242/24/12/125009
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Scaling benefits of CMOS processes include the reduction of the oxide thickness, which in turn favors the reduction of threshold voltage shifts due to radiation-induced gate oxide trapped charge. Moreover, experimental results have shown that this inherent radiation hardness of deep submicron processes can be further exploited using gate-enclosed layout transistors with an annular design. For an in-depth analysis of such structures, we present in this paper a 2D analytical I-V model for short-channel annular devices based on the direct solution of the Poisson equation in cylindrical coordinates. The theoretical approach is confirmed with experimental data in a standard CMOS 0.18 mu m process.
引用
收藏
页数:6
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