Sensitivity Analysis and Structure Design for Tri-mass Structure Micromachined Gyroscope

被引：2

作者：

Xie, Liqiang ^{[1
]}

Xiao, Dingbang ^{[1
]}

Wang, Haoxu ^{[1
]}

Wu, Xuezhong ^{[1
]}

Li, Shengyi ^{[1
]}

机构：

[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, Changsha, Hunan, Peoples R China

来源：

2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年

关键词：

Micromachined gyroscope; sensitivity analysis; structure design; tri-mass;

D O I：

10.1109/NEMS.2009.5068541

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design method for increasing gyroscope sensitivity is studied. By designing lumped parameter models of uni-mass, bi-mass, and tri-mass gyroscope structures, the influence between sensitivity and model parameters is analyzed. These three gyroscope structures are optimized in the same condition and the result shows that the sensitivity ratio of the three structures is 1:7:800 in the condition of frequency matching. Tri-mass structure's high sensitivity shows its advantage in high performance design.

引用

页码：126 / 129

页数：4

共 5 条

[1] DUSSY S, 2005, AIAA GUID NAV CONTR
[2] A new design concept for vibrating microgyroscope
Logeeswaran, VJ
Ng, DCK
Tay, FEH
[J]. MICROMACHINING AND MICROFABRICATION, 2000, 4230 : 109 - 118
[3] Common design techniques for BEI GyroChip quartz rate sensors for both automotive and aerospace/defense markets
Madni, AM
Costlow, LE
Knowles, SJ
[J]. IEEE SENSORS JOURNAL, 2003, 3 (05) : 569 - 578
[4] Micromachined gyroscopes: Challenges, design solutions, and opportunities
Shkel, AM
[J]. SMART STRUCTURES AND MATERIALS 2001: SMART ELECTRONICS AND MEMS, 2001, 4334 : 74 - 85
[5] Micromachined inertial sensors
Yazdi, N
Ayazi, F
Najafi, K
[J]. PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1640 - 1659

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