Observation of inverse hysteresis in the E to H mode transitions in inductively coupled plasmas

被引：33

作者：

Lee, Min-Hyong ^{[1
]}

Chung, Chin-Wook ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect & Comp Engn, Seoul 133791, South Korea

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2010年 / 19卷 / 01期

关键词：

POWER ABSORPTION; DISCHARGE; COIL;

D O I：

10.1088/0963-0252/19/1/015011

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An inverse hysteresis is observed during the E mode to H mode transition in low pressure argon inductively coupled plasmas. The transition is accompanied by an evolution of electron energy distribution from the bi-Maxwellian to the Maxwellian distribution. The mechanism of this inversion is not clear. However, we think that the bi-Maxwellian electron energy distribution in E mode, where the proportion of high energy electron is much higher than the Maxwellian distribution, would be one of the reasons for the observed inverse hysteresis. As the gas pressure increases, the inverse hysteresis disappears and the E to H mode transition follows the scenario of usual hysteresis.

引用

页数：6

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