A Lateral ZnO Nanowire Photodetector Prepared on Glass Substrate

被引:61
作者
Weng, W. Y. [1 ,2 ,3 ]
Chang, S. J. [1 ,2 ,3 ]
Hsu, C. L. [4 ]
Hsueh, T. J. [5 ]
Chang, S. P. [1 ,2 ,3 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 701, Taiwan
[4] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[5] Natl Nano Device Labs, Tainan 741, Taiwan
关键词
II-VI semiconductors; nanofabrication; nanowires; photodetectors; semiconductor growth; semiconductor quantum wires; ultraviolet detectors; wide band gap semiconductors; zinc compounds; CHEMICAL-VAPOR-DEPOSITION; GA/GLASS TEMPLATES; NANORODS; GROWTH; EVAPORATION;
D O I
10.1149/1.3264650
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We report the fabrication of a lateral ZnO nanowire UV photodetector on a glass substrate using tungsten as the growth barrier to suppress the vertical growth of the ZnO nanowires. Upon UV illumination, the detector current increased by more than 1 order of magnitude. Furthermore, the noise equivalent power and the normalized detectivity D(*) of the fabricated lateral ZnO nanowire photodetector were 7.89x10(-11) W and 1.9x10(8) cm Hz(0.5) W(-1), respectively.
引用
收藏
页码:K30 / K33
页数:4
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