Meso-silica/Erbium-doped ceria binary particles as functionalized abrasives for photochemical mechanical polishing (PCMP)

被引:37
作者
Chen, Ailian [1 ]
Duan, Yuhan [1 ]
Mu, Zhaoyu [2 ]
Cai, Wenjie [2 ]
Chen, Yang [2 ]
机构
[1] Changzhou Univ, Sch Mech Engn, Changzhou 213016, Jiangsu, Peoples R China
[2] Changzhou Univ, Sch Mat Sci & Engn, Changzhou 213016, Jiangsu, Peoples R China
基金
中国国家自然科学基金;
关键词
Meso-silica; Er3+-doped ceria; Binary particle; Functionalized abrasive; Photochemical mechanical polishing (PCMP); HIGH-EFFICIENCY; HETEROJUNCTION PHOTOCATALYSTS; PLANARIZATION; OXIDATION; CO; NANOCATALYSTS; DEGRADATION; SURFACE; OXYGEN; MODEL;
D O I
10.1016/j.apsusc.2021.149353
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report the design and synthesis of meso-silica/ceria binary composite particles and their usage as functionalized abrasives for photochemical mechanical polishing (PCMP). Meso-silica nanospheres were uniformly coated with (Er3+-doped) ceria nanoparticles via an environmentally friendly precipitation approach. The resulting products were characterized by XRD, FESEM, HRTEM, HADDF-STEM, EDX mapping, UV?vis, Raman, XPS, PL, and nitrogen adsorption?desorption measurements. High-resolution AFM analyses revealed that the binary abrasives contributed to mechanical damage and scratch eliminations, and finally achieved ultra-smooth surfaces with an average root-mean-square roughness of less than 0.2 nm. Owing to the increased oxygen vacancy and Ce3+ ion contents, the Er3+-doped abrasives in oxide-PCMP exhibited superior removal rates derived from the improved photocatalytic and tribochemical activities, thus leading to a 160% increment of removal rates compared to the undoped ones in oxide-CMP. The topographical variations of the surfaces after PCMP with Er3+-doped composites significantly reduced from ?3.1 nm to ?0.39 nm. High-quality and high-efficiency polishing can be achieved by the dynamical balance between the photocatalytic surface modification and the tribochemical material removal of the chemically soft layers. Furthermore, the synergistic roles of elastic mesosilica supports and active ceria components of the binary abrasives in material removal processes were also discussed.
引用
收藏
页数:13
相关论文
共 40 条
  • [1] Enhanced soot oxidation by lattice oxygen via La3+-doped CeO2
    Bueno-López, A
    Krishna, K
    Makkee, M
    Moulijn, JA
    [J]. JOURNAL OF CATALYSIS, 2005, 230 (01) : 237 - 248
  • [2] Silica-Coated Core-Shell Structured Polystyrene Nanospheres and Their Size-Dependent Mechanical Properties
    Cao, Xu
    Pan, Guoshun
    Huang, Peng
    Guo, Dan
    Xie, Guoxin
    [J]. LANGMUIR, 2017, 33 (33) : 8225 - 8232
  • [3] Dissociative adsorption of methane on the Cu and Zn doped (111) surface of CeO2
    Carey, John J.
    Nolan, Michael
    [J]. APPLIED CATALYSIS B-ENVIRONMENTAL, 2016, 197 : 324 - 336
  • [4] Erbium-doped oxygen deficient cerium oxide: bi-functional material in the field of spintronics and photocatalysis
    Chahal, Surjeet
    Kumar, Ashok
    Kumar, Parmod
    [J]. APPLIED NANOSCIENCE, 2020, 10 (06) : 1721 - 1733
  • [5] Ceria coated hexagonal mesoporous silica core-shell composite particle abrasives for improved chemical-mechanical planarization performance
    Chen, Ailian
    Wang, Wanying
    Ma, Xiangyu
    Chen, Yang
    [J]. JOURNAL OF POROUS MATERIALS, 2019, 26 (04) : 1005 - 1015
  • [6] Design of ceria grafted mesoporous silica composite particles for high-efficiency and damage-free oxide chemical mechanical polishing
    Chen, Yang
    Zuo, Changzhi
    Li, Zefeng
    Chen, Ailian
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2018, 736 : 276 - 288
  • [7] 亚微米介孔二氧化硅微球的制备及其弹性模量的拟合计算
    陈杨
    陈爱莲
    秦佳伟
    李泽锋
    [J]. 中国有色金属学报, 2017, 27 (06) : 1228 - 1235
  • [8] Monodispersed mesoporous silica (mSiO2) spheres as abrasives for improved chemical mechanical planarization performance
    Chen, Yang
    Li, Zefeng
    Qin, Jiawei
    Chen, Ailian
    [J]. JOURNAL OF MATERIALS SCIENCE, 2016, 51 (12) : 5811 - 5822
  • [9] Atomic force microscopy indentation to determine mechanical property for polystyrene-silica core-shell hybrid particles with controlled shell thickness
    Chen, Yang
    Qian, Cheng
    Miao, Naiming
    [J]. THIN SOLID FILMS, 2015, 579 : 57 - 63
  • [10] Polishing behavior of PS/CeO2 hybrid microspheres with controlled shell thickness on silicon dioxide CMP
    Chen, Yang
    Long, Renwei
    [J]. APPLIED SURFACE SCIENCE, 2011, 257 (20) : 8679 - 8685