Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

被引：11

作者：

Yuryeva, Alena V. ^{[1
]}

Shabunin, Artyom S. ^{[1
]}

Korzhenko, Dmitry V. ^{[1
]}

Korneva, Olga S. ^{[1
]}

Nikolaev, Mikhail V. ^{[1
]}

机构：

[1] Natl Res Tomsk Polytech Univ, 30 Lenin Av, Tomsk 634050, Russia

来源：

VACUUM | 2017年 / 141卷

基金：

俄罗斯科学基金会;

关键词：

Magnetron sputtering systems; Liquid-phase target; High-rate coating deposition; DEPOSITION;

D O I：

10.1016/j.vacuum.2017.04.001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper presents a high-rate method for metal coating deposition by the means of magnetron sputtering system (MSS) with liquid-phase target. Maximum copper deposition rate at a power density of 55 W/cm(2) is 200 nm/s, which is twenty times higher than if an ordinary magnetron is used. The effect of material of the crucible on operation of MSS with liquid-phase target and copper coating deposition rate is studied. It is demonstrated that using the crucible with a lower emissivity allows the several-fold increase in deposition rate. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：135 / 138

页数：4

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