New bulk accelerometer for triaxial detection.

被引：0

作者：

Plaza, JA

Chen, H

Esteve, J

机构：

来源：

TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年

关键词：

triaxial accelerometer; piezoresistive; BESOI;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new structure for a piezoresistive triaxial accelerometer has been designed and fabricated. The FEM simulations shows a null cross sensitivity for the x and y detection and a very low level one for the z direction, <1.6%. The metal lines and the thickness of the pasivation silicon oxide layers have been reduced to decrease stresses in the devices. The technology for the devices is a combination of bulk and surface micromachining based on commercial BESOI wafers.

引用

页码：1231 / 1232

页数：2