Implementation of a novel large moving range submicrometer positioner

被引：11

作者：

Chen, Mei-Yung ^{[2
]}

Tzeng, Huan-Wen ^{[1
]}

机构：

[1] Natl Taiwan Normal Univ, Dept Ind Educ, Taipei, Taiwan

[2] Natl Taiwan Normal Univ, Dept Mechatron Technol, Taipei, Taiwan

来源：

MECHATRONICS | 2009年 / 19卷 / 07期

关键词：

Parallel flexure mechanism; Electromagnetic actuator; Self-tuning adaptive control; Precision positioning; Submicrometer positioner; LINEAR MOTORS; DESIGN; DYNAMICS; SYSTEM; STAGE;

D O I：

10.1016/j.mechatronics.2009.01.012

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A novel, compact and two degree-of-freedoms (DOF) submicrometer positioner with a large moving range is presented in this paper. The design of the positioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and eddy current sensors to achieve the precision 2-DOF motion. The travel range of the positioner is 1000 mu m/5 mrad and which depend on the eddy current sensor's range of measurement (ROM) and electromagnetic actuator's effective length. The analytical model and its dynamics were analyzed and derived. The whole control architecture takes the measured configuration parameters and endeavors to control the positioner motion by regulating the currents in the electromagnetic actuators. To increase the compactness and stability of the positioner, a self-tuning adaptive (STA) controller was analyzed and proposed. From the experimental results, satisfactory performances of the system, including stiffness and precision, have been successfully demonstrated. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：1143 / 1151

页数：9

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