Single step self-enclosed fluidic channels via two photon absorption (TPA) polymerization

被引：15

作者：

Jariwala, S. ^{[1
]}

Venkatakrishnan, K. ^{[1
]}

Tan, B. ^{[2
]}

机构：

[1] Ryerson Univ, Dept Mech Engn, Toronto, ON M3N 2H8, Canada

[2] Ryerson Univ, Dept Aerosp Engn, Toronto, ON M3N 2H8, Canada

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 02期

关键词：

NANOFLUIDIC CHANNELS; NM; FABRICATION; SILICON; PHOTOPOLYMERIZATION; LASER; GLASS;

D O I：

10.1364/OE.18.001630

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we demonstrate a simple, fast and single-step method for fabricating self-enclosed fluidic channels via TPA. Pairs of parallel, polymerized ribs are linked by the subsequent polymerization with correctly predetermined offset between the ribs. The region, where the radicals are initiated but its concentration is below the threshold, we called it a sub-activated region. The subsequent polymerization is triggered by the overlap of the sub-activated regions of the two adjacent ribs. The dimensions of the self-enclosed channels depends on the offset between ribs, the scan speed as well as the laser parameters such as pulse energy, pulsewidth and repetition rate. (C) 2010 Optical Society of America

引用

页码：1630 / 1636

页数：7

共 15 条

[1] Biochemical analysis with microfluidic systems [J].

Bilitewski, U ;

Genrich, M ;

Kadow, S ;

Mersal, G .

ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2003, 377 (03) :556-569

[2] Femtosecond laser micromachining of grooves in silicon with 800 nm pulses [J].

Crawford, THR ;

Borowiec, A ;

Haugen, HK .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08) :1717-1724

[3] PDMS-based microfluidic devices for biomedical applications [J].

Fujii, T .

MICROELECTRONIC ENGINEERING, 2002, 61-2 :907-914

[4] Microfluidics in commercial applications; an industry perspective [J].

Haber, Carsten .

LAB ON A CHIP, 2006, 6 (09) :1118-1121

[5] Micro-fluidic channel fabrication via two-photon absorption (TPA) polymerization assisted ablation [J].

Jariwala, S. ;

Tan, B. ;

Venkatakrishnan, K. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (11)

[6] Fabricating high-aspect-ratio sub-diffraction-limit structures on silicon with two-photon photopolymerization and reactive ion etching [J].

Lee, CH ;

Chang, TW ;

Lee, KL ;

Lin, JY ;

Wang, J .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (08) :2027-2031

[7] Sacrificial polymers for nanofluidic channels in biological applications [J].

Li, WL ;

Tegenfeldt, JO ;

Chen, L ;

Austin, RH ;

Chou, SY ;

Kohl, PA ;

Krotine, J ;

Sturm, JC .

NANOTECHNOLOGY, 2003, 14 (06) :578-583

[8] Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding [J].

Mao, P ;

Han, JY .

LAB ON A CHIP, 2005, 5 (08) :837-844

[9] Fabrication of microchannels using polycarbonates as sacrificial materials [J].

Reed, HA ;

White, CE ;

Rao, V ;

Allen, SAB ;

Henderson, CL ;

Kohl, PA .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (06) :733-737

[10] Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate [J].

Shah, L ;

Arai, A ;

Eaton, S ;

Herman, P .

OPTICS EXPRESS, 2005, 13 (06) :1999-2006

← 1 2 →