Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings

被引：5

作者：

Ling, Xiu-Lan ^{[1
]}

Zhao, Yuan-An

Li, Da-Wei

Zhou, Ming

Shao, Jian-Da

Fan, Zheng-Xiu

机构：

[1] Shanghai Inst Opt & Fine Mech, Key Lab Mat Sci & Technol High Power Lasers, Shanghai 201800, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2009年 / 26卷 / 07期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1088/0256-307X/26/7/074203

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.

引用

页数：4