Radius measurement by laser confocal technology

被引：18

作者：

Yang, Jiamiao ^{[1
]}

Qiu, Lirong ^{[1
]}

Zhao, Weiqian ^{[1
]}

Zhang, Xin ^{[1
]}

Wang, Xu ^{[2
]}

机构：

[1] Beijing Inst Technol, Optoelect Coll, Beijing Key Lab Precis Optoelect Measurement Inst, Beijing 100081, Peoples R China

[2] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China

来源：

APPLIED OPTICS | 2014年 / 53卷 / 13期

基金：

中国国家自然科学基金;

关键词：

INTERFEROMETRY; CURVATURE; SPHERES;

D O I：

10.1364/AO.53.002860

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A laser confocal radius measurement (LCRM) method is proposed for high- accuracy measurement of the radius of curvature (ROC). The LCRM uses the peak points of confocal response curves to identify the cat eye and confocal positions precisely. It then accurately measures the distance between these two positions to determine the ROC. The LCRM also uses conic fitting, which significantly enhances measurement accuracy by restraining the influences of environmental disturbance and system noise on the measurement results. The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres. Thus, LCRM is a feasible method for ROC measurements with high accuracy and concise structures. (C) 2014 Optical Society of America

引用

页码：2860 / 2865

页数：6

共 15 条

[1]

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