Continuous-Wave Operation of 520 nm Green InGaN-Based Laser Diodes on Semi-Polar {20(2)over-bar1} GaN Substrates

被引:165
作者
Yoshizumi, Yusuke [1 ]
Adachi, Masahiro [1 ]
Enya, Yohei [1 ]
Kyono, Takashi [1 ]
Tokuyama, Shinji [1 ]
Sumitomo, Takamichi [1 ]
Akita, Katsushi [1 ]
Ikegami, Takatoshi [1 ]
Ueno, Masaki [1 ]
Katayama, Koji [1 ]
Nakamura, Takao [1 ]
机构
[1] Sumitomo Elect Ind Ltd, Semicond Technol R&D Labs, Itami, Hyogo 6640016, Japan
关键词
D O I
10.1143/APEX.2.092101
中图分类号
O59 [应用物理学];
学科分类号
摘要
Room-temperature continuous-wave operation of 520 nm InGa-based green laser diodes on semi-polar {20 (2) over bar1} GaN substrates was demonstrated. A threshold current of 95 mA corresponding to a threshold current density of 7.9 kA/cm(2) and a threshold voltage of 9.4 V were achieved by improving the quality of epitaxial layers on {20 (2) over bar1} GaN substrates using lattice-matched quaternary InAlGaN cladding layers and also by adopting a ridge-waveguide laser structure. (C) 2009 The Japan Society of Applied Physics
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页数:3
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