Fundamentals of solid state ionic micro gas sensors

被引：77
作者：
Dubbe, A [1 ]
机构：
[1] Max Planck Inst Met Res, PML, Dept Aldinger, D-70569 Stuttgart, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 88卷 / 02期
关键词：
gas sensors; solid electrolytes; thin-films; microsensors;
D O I：
10.1016/S0925-4005(02)00317-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Miniaturization of solid electrolyte gas sensors to thin-film microdevices with microelectrodes meets the requirements to reduce weight, volume and energy consumption. A future trend is integration on silicon substrates. This survey deals with working and design principles of electrochemical micro gas sensors based on ionic conduction in thin-films. Associated aspects of properties and processing of solid electrolyte thin-films, electrochemistry of microelectrodes, chemical compatibility of materials, and mechanical and thermal stability of solid sate ionic microdevices are also discussed. Particular emphasis is put on selection criteria for electrolyte, electrode, and insulating materials that are compatible with silicon technology. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：138 / 148
页数：11
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