High-throughput intermittent-contact scanning probe microscopy

被引：9

作者：

Sahoo, Deepak R. ^{[1
]}

Haeberle, Walter ^{[1
]}

Sebastian, Abu ^{[1
]}

Pozidis, Haralampos ^{[1
]}

Eleftheriou, Evangelos ^{[1
]}

机构：

[1] IBM Res Zurich, CH-8803 Ruschlikon, Switzerland

来源：

NANOTECHNOLOGY | 2010年 / 21卷 / 07期

基金：

欧洲研究理事会;

关键词：

ATOMIC-FORCE MICROSCOPY; DATA-STORAGE; WEAR; LITHOGRAPHY; GBIT/IN(2);

D O I：

10.1088/0957-4484/21/7/075701

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Large arrays of micro-cantilevers operating in parallel are essential for achieving high throughput in such applications as life sciences, nanofabrication and semiconductor metrology. A novel intermittent-contact mode operation is presented that is suitable for such applications. The cantilevers are electrostatically actuated. The oscillation amplitude is kept small to enable high-frequency operation and to reduce the tip-sample interaction force, and thus the tip and sample wear. Input shaping of the actuation signal is employed for high-speed reliable operation in the presence of the tip-sample adhesion forces. The deflection signal is sampled once per oscillation cycle to enable high-speed imaging. Experimental results are shown which demonstrate the efficacy of the proposed scheme. In particular, during continuous high-speed imaging, the tip diameter is maintained over a remarkable 140 m of tip travel.

引用

页数：7

共 24 条

[1]

AGARWAL P, 2008, P 47 IEEE C DEC CONT, P2624

[2] High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes [J].