Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors

被引：11

作者：

Hallett, Lily ^{[1
]}

Charaev, Ilya ^{[1
]}

Agarwal, Akshay ^{[1
]}

Dane, Andrew ^{[1
]}

Colangelo, Marco ^{[1
]}

Zhu, Di ^{[1
]}

Berggren, Karl K. ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, 50 Vassar St, Cambridge, MA 02139 USA

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2021年 / 34卷 / 03期

基金：

美国国家科学基金会;

关键词：

superconducting films; nanowires; single-photon detectors; reactive magnetron sputtering;

D O I：

10.1088/1361-6668/abda5f

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore, we have shown that meander-shaped single-photon detectors made from 5 nm MoN films have saturated quantum detection efficiency at the telecom wavelength of 1550 nm. Our results indicate that MoN may be a material of interest for practical applications of low-temperature superconductors, including single-photon detectors and transition-edge sensors.

引用

页数：8

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