共 50 条
- [1] Pulse Thermal Processing for Low Thermal Budget Integration of IGZO Thin Film Transistors IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2015, 3 (03): : 297 - 301
- [2] Fatigue characteristics of PZT thin films prepared by low thermal budget process PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II, 2001, : 599 - 602
- [10] Low thermal budget NiSi films on SiGe alloys NOVEL MATERIALS AND PROCESSES FOR ADVANCED CMOS, 2003, 745 : 247 - 252