Microstructure and Dielectric Properties of LPCVD/CVI-SiBCN Ceramics Annealed at Different Temperatures

被引：11
作者：
Li, Jianping [1 ]
Zhao, Mingxi [1 ]
Liu, Yongsheng [1 ,2 ]
Chai, Nan [1 ]
Ye, Fang [1 ]
Qin, Hailong [1 ]
Cheng, Laifei [1 ]
Zhang, Litong [1 ]
机构：
[1] Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Peoples R China
[2] Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Peoples R China
来源：
MATERIALS | 2017年 / 10卷 / 06期
关键词：
siliconboron carbonitride ceramic; dielectric properties; electromagnetic wave absorbing properties; heat treatment; chemical vapor deposition and infiltration; MICROWAVE-ABSORPTION PROPERTIES; POLYMER-DERIVED CERAMICS; EMW ABSORBING PROPERTIES; MECHANICAL-PROPERTIES; MATRIX COMPOSITES; COATINGS;
D O I：
10.3390/ma10060655
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
SiBCN ceramics were introduced into porous Si3N4 ceramics via a low-pressure chemical vapor deposition and infiltration (LPCVD/CVI) technique, and then the composite ceramics were heat-treated from 1400 degrees C to 1700 degrees C in a N-2 atmosphere. The effects of annealing temperatures on microstructure, phase evolution, dielectric properties of SiBCN ceramics were investigated. The results revealed that -Si3N4 and free carbon were separated below 1700 degrees C, and then SiC grains formed in the SiBCN ceramic matrix after annealing at 1700 degrees C through a phase-reaction between free carbon and -Si3N4. The average dielectric loss of composites increased from 0 to 0.03 due to the formation of dispersive SiC grains and the increase of grain boundaries.
引用
收藏
页数：12
相关论文
共 33 条
[1]   Thermodynamic analysis on deposition of Si-B-C-N ceramic by low pressure chemical vapor deposition/infiltration from SiCH3Cl3-BCl3-NH3-H2-Ar system [J].
Dong, Ning ;
Chai, Nan ;
Liu, Yongsheng ;
Liu, Xiaofei ;
Qin, Hailong ;
Yin, Xiaowei ;
Zhang, Litong ;
Cheng, Laifei .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2016, 36 (15) :3581-3591
[2]   Synthesis and EMW absorbing properties of nano SiC modified PDC-SiOC [J].
Duan, Wenyan ;
Yin, Xiaowei ;
Ye, Fang ;
Li, Quan ;
Han, Meikang ;
Liu, Xiaofei ;
Cai, Yanzhi .
JOURNAL OF MATERIALS CHEMISTRY C, 2016, 4 (25) :5962-5969
[3]   Interpretation of Raman spectra of disordered and amorphous carbon [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107
[4]   Hierarchical graphene/SiC nanowire networks in polymer-derived ceramics with enhanced electromagnetic wave absorbing capability [J].
Han, Meikang ;
Yin, Xiaowei ;
Duan, Wenyan ;
Ren, Sa ;
Zhang, Litong ;
Cheng, Laifei .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2016, 36 (11) :2695-2703
[5]   Polymeric nanocomposites for electromagnetic wave absorption [J].
Huo, Jia ;
Wang, Li ;
Yu, Haojie .
JOURNAL OF MATERIALS SCIENCE, 2009, 44 (15) :3917-3927
[6]   Mechanical and optical properties of hard SiCN coatings prepared by PECVD [J].
Jedrzejowski, P ;
Cizek, J ;
Amassian, A ;
Klemberg-Sapieha, JE ;
Vlcek, J ;
Martinu, L .
THIN SOLID FILMS, 2004, 447 :201-207
[7]   Synthesis and characterization of quaternary Ti-Si-C-N coatings prepared by a hybrid deposition technique [J].
Jeon, JH ;
Choi, SR ;
Chung, WS ;
Kim, KH .
SURFACE & COATINGS TECHNOLOGY, 2004, 188 :415-419
[8]   Cfiber/SiCfiller/Si-B-C-Nmatrix composites with extremely high thermal stability [J].
Lee, S. -H. ;
Weinmann, M. .
ACTA MATERIALIA, 2009, 57 (15) :4374-4381
[9]   Extraordinary thermal stability of SiC particulate-reinforced polymer-derived Si-B-C-N composites [J].
Lee, Sea-Hoon ;
Weinmann, Markus ;
Gerstel, Peter ;
Aldinger, Fritz .
SCRIPTA MATERIALIA, 2008, 59 (06) :607-610
[10]   Processing and properties of C/Si-B-C-N fiber-reinforced ceramic matrix composites prepared by precursor impregnation and pyrolysis [J].
Lee, See Hoon ;
Weinmann, Markus ;
Aldinger, Fritz .
ACTA MATERIALIA, 2008, 56 (07) :1529-1538
1234