Development of an Argon Gas Cluster Ion Beam for ToF-SIMS Analysis

被引：9

作者：

Lee, Sang Ju ^{[1
]}

Choi, Chang Min ^{[1
]}

Min, Boo Ki ^{[1
]}

Baek, Ji Young ^{[1
]}

Eo, Jae Yeong ^{[1
]}

Choi, Myoung Choul ^{[1
]}

机构：

[1] Korea Basic Sci Inst, Div Sci Instrumentat, Mass Spectrometry & Adv Instrumentat Res Grp, Cheongju, South Korea

来源：

BULLETIN OF THE KOREAN CHEMICAL SOCIETY | 2019年 / 40卷 / 09期

关键词：

Gas cluster ion beam; Ar gas cluster ion beam; Time-of-flight secondary ion mass spectrometry; Soft ionization; Sputter; Rhodamine; 6G; MASS-SPECTROMETRY; SYSTEM; DYES;

D O I：

10.1002/bkcs.11840

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Argon gas cluster ion beams (Ar-GCIBs) are widely used as a sputter and primary beam for analyzing soft materials such as organic and biological samples in secondary ion mass spectrometry. We designed a novel ionization source using Simion simulation to improve the beam generation efficiency, and compared with the experimental results. Simulation results of different operation voltages, which are acceleration and extraction from the ionization source were in good agreement with the experimental results. At Ar pressure of 25 bar, total ion beam currents from the ionization source reached 80 mu A. The highest current of cluster in the ion beam was found at cluster sizes of 1400. Simple linear time-of-flight mass spectrometer was constructed and then a secondary ion mass spectrum signal of Rhodamine 6G was obtained by using a Ar-1400(+) (@10 keV) cluster ion beam.

引用

页码：877 / 881

页数：5

共 27 条

[1]

[Anonymous], SIMION 8 1

[2]

Aoki T., 2003, T MAT RES SOC JPN, V28, P485

[3] ToF-SIMS analysis of an organic layer using toluene and its cluster ion beam projectiles generated by multiphoton ionization [J].