Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control

被引：3

作者：

Suzuki, Takamasa ^{[1
]}

Takahashi, Tsutomu ^{[1
]}

Sasaki, Osami ^{[1
]}

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

APPLIED OPTICS | 2009年 / 48卷 / 29期

关键词：

MODULATION; SYSTEM;

D O I：

10.1364/AO.48.005561

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8nm. (C) 2009 Optical Society of America

引用

收藏

页码：5561 / 5566

页数：6

相关论文

共 11 条

[1] HETERODYNE INTERFEROMETRY WITH A FREQUENCY-MODULATED LASER DIODE [J].

CHEN, J ;

ISHII, Y ;

MURATA, K .

APPLIED OPTICS, 1988, 27 (01) :124-128

[2] QUASIHETERODYNE OPTICAL FIBER SENSOR WITH AUTOMATED ADJUSTMENT OF THE DRIVING WAVE PARAMETER [J].

HOTATE, K ;

JONG, DT .

APPLIED OPTICS, 1987, 26 (15) :2956-2961

[3] FIBER OPTIC PHASE STEPPING SYSTEM FOR INTERFEROMETRY [J].

MERCER, CR ;

BEHEIM, G .

APPLIED OPTICS, 1991, 30 (07) :729-734

[4] Frame rate phase-shifting interferometer with a frequency-modulated laser diode [J].

Onodera, R ;

Ishii, Y .

OPTICAL ENGINEERING, 1999, 38 (12) :2045-2049

[5] DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT [J].

SASAKI, O ;

YOSHIDA, T ;

SUZUKI, T .

APPLIED OPTICS, 1991, 30 (25) :3617-3621

[6] SINUSOIDAL PHASE MODULATING LASER DIODE INTERFEROMETER WITH A FEEDBACK-CONTROL SYSTEM TO ELIMINATE EXTERNAL DISTURBANCE [J].

SASAKI, O ;

TAKAHASHI, K ;

SUZUKI, T .

OPTICAL ENGINEERING, 1990, 29 (12) :1511-1515

[7] Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer [J].

Suzuki, T ;

Maki, T ;

Zhao, X ;

Sasaki, O .

APPLIED OPTICS, 2002, 41 (10) :1949-1953

[8] REAL-TIME 2-DIMENSIONAL SURFACE PROFILE MEASUREMENT IN A SINUSOIDAL PHASE-MODULATING LASER-DIODE INTERFEROMETER [J].

SUZUKI, T ;

SASAKI, O ;

KANEDA, J ;

MARUYAMA, T .

OPTICAL ENGINEERING, 1994, 33 (08) :2754-2759

[9] Phase-locked phase-shifting laser diode interferometer with photothermal modulation [J].

Suzuki, T ;

Zhao, XF ;

Sasaki, O .

APPLIED OPTICS, 2001, 40 (13) :2126-2131

[10] DIODE-LASER DIRECT MODULATION HETERODYNE INTERFEROMETER [J].

TATSUNO, K ;

TSUNODA, Y .

APPLIED OPTICS, 1987, 26 (01) :37-40