共 11 条
[1]
[Anonymous], 2013, COV MEMS US GUID
[2]
Hutchby J., 2010, ASS POT MAT SEL EM R
[3]
Natarajan S., 2014, 2014 IEEE International Electron Devices Meeting (IEDM), DOI 10.1109/IEDM.2014.7046976
[4]
Nguyen X.-T., 2015, P INT C INT CIRC DES, P9
[5]
The enhanced photoresist shrink process technique toward 22nm node
[J].
ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII,
2011, 7972
[6]
Park J, 2009, PROCEEDINGS OF TECHNICAL PROGRAM: 2009 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATIONS, P105, DOI 10.1109/VTSA.2009.5159312
[10]
Xu N., 2014, 2014 IEEE International Electron Devices Meeting, P28