Monte Carlo simulation of low-medium energy electrons backscattered from C/Al double layer thin films

The backscattering coefficient of low-medium energy electron beams (from 250 to 10 000 eV) impinging on C/Al double layered thin films was investigated by a Monte Carlo simulation. The aim of the research was to study the behaviour of the backscattering coefficient as a function of the beam primary energy and the thicknesses of the two layers. The backscattering coefficient as a function of the primary energy presents features that can be used to evaluate the thicknesses of the two layers. Copyright (C) 2006 John Wiley & Sons, Ltd.